Si substrate resistivity design for on-chip matching circuit based on electro-magnetic simulation

IEICE Transactions on Electronics

Volumn E84-C, Issue 7, 2001, Pages 923-930

  Ono, Masayoshi ^a   Suematsu, Noriharu ^a   Kubo, Shunji ^a   Nakajima, Kensuke ^a   Iyama, Yoshitada ^a   Takagi, Tadashi ^a   Ishida, Osami ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Electro magnetic simulation; High resistivity Si substrate; Low noise amplifier; Si MMIC; Spiral inductor

Indexed keywords

AMPLIFIERS (ELECTRONIC); COMPUTER SIMULATION; DIELECTRIC LOSSES; ELECTRIC CONDUCTIVITY; ELECTRIC INDUCTORS; ELECTRIC NETWORK PARAMETERS; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SEMICONDUCTING SILICON; SUBSTRATES; WAVEGUIDES;

CONDUCTOR LOSS; ELECTROMAGNETIC SIMULATION; LOW NOISE AMPLIFIER; SILICON SUBSTRATE; SPIRAL INDUCTOR;

MONOLITHIC MICROWAVE INTEGRATED CIRCUITS;

EID: 0035393050     PISSN: 09168524     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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