13.56 MHz hollow cathode jet matrix plasma source for large area surface coating

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 366-372

  Mildner, M ^a   Korzec, D ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Hexamethyldisiloxane; High rate deposition; Large area coating; Multijet plasma source; Plasma processing; Remote polymerization; RF hollow cathode discharge

Indexed keywords

ANODES; ARGON; CATHODES; DEPOSITION; FLOW OF FLUIDS; JETS; OXYGEN; PLASMA DENSITY; PLASMA POLYMERIZATION; SILICON COMPOUNDS;

HEXAMETHYLDISILOXANE;

PLASMA SOURCES;

EID: 0033076376     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00778-6     Document Type: Article

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