Current progress in the modeling of weakly ionized plasmas in contact with electrodes and insulated walls

Surface and Coatings Technology

Volumn 142-144, Issue , 2001, Pages 517-525

  Uhrlandt, D ^a   Loffhagen, D ^a   Arndt, S ^a   Winkler, R ^a  

^a Inst Niedertemperatur Plasmaphys   (Germany)

Author keywords

Boltzmann equation; Electrode region; Glow discharge; Non isothermal plasma; Non local electron kinetics

Indexed keywords

CATHODES; ELECTRIC DISCHARGES; ELECTRONS; WALLS (STRUCTURAL PARTITIONS);

ENERGY FLUXES;

PLASMA INTERACTIONS;

PLASMA TREATMENT;

EID: 0035387359     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(01)01110-0     Document Type: Article

References (31)