The electron kinetics in the cathode region of H2/Ar/N2 discharges

Plasma Sources Science and Technology

Volumn 9, Issue 3, 2000, Pages 387-399

  Hannemann, M ^a   Hardt, P ^b   Loffhagen, D ^a   Schmidt, M ^a   Winkler, R ^a  

^a Inst Niedertemperatur Plasmaphys   (Germany)

^b Kratzer Automotion   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CATHODES; DEPOSITION; ELECTRIC DISCHARGES; ELECTRON ENERGY LEVELS; ELECTRON GAS; FUNCTIONS; HYDROGEN; KINETIC THEORY; MATHEMATICAL MODELS; TITANIUM NITRIDE;

BOLTZMANN EQUATION; ELECTRON VELOCITY DISTRIBUTION FUNCTIONS; TITANIUM TETRACHLORIDE;

PLASMA SOURCES;

EID: 0034248398     PISSN: 09630252     EISSN: None     Source Type: Journal    
DOI: 10.1088/0963-0252/9/3/317     Document Type: Article

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