BCN coatings on polymer substrates by plasma CVD at low temperature

Surface and Coatings Technology

Volumn 116-119, Issue , 1999, Pages 1166-1171

  Wohle J ^a   Ahn, H ^b   Rie, K T ^b  

^a FRAUNHOFER INSTITUTE FOR SURFACE ENGINEERING AND THIN FILMS IST   (Germany)

^b TECHNICAL UNIVERSITY OF BRAUNSCHWEIG   (Germany)

Author keywords

Boron carbon nitride; Plasma chemical vapor deposition; Polymers; Wear resistant coatings

Indexed keywords

ADHESION; BORON CARBIDE; CERAMIC COATINGS; CHEMICAL BONDS; HARDNESS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NITRIDES; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCARBONATES; STOICHIOMETRY; TRANSPARENCY; WEAR RESISTANCE;

BORON CARBON NITRIDE; WEAR RESISTANT COATINGS;

PROTECTIVE COATINGS;

CERAMIC COATING; LOW TEMPERATURE APPLICATION; PLASMA TREATMENT; POLYMER; VAPOR DEPOSITION;

EID: 0037818738     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00146-2     Document Type: Conference Paper

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