|
Volumn 100-101, Issue 1-3, 1998, Pages 45-48
|
Scratch-resistant transparent boron nitride films
|
Author keywords
Boron nitride; Microstructure; PACVD films; Transparent films
|
Indexed keywords
AMORPHOUS FILMS;
BORON COMPOUNDS;
INFRARED SPECTROSCOPY;
INTERFACES (MATERIALS);
MICROSTRUCTURE;
PLASMA APPLICATIONS;
SUBSTRATES;
TRANSMISSION ELECTRON MICROSCOPY;
TRANSPARENCY;
WEAR RESISTANCE;
X RAY DIFFRACTION ANALYSIS;
BORON NITRIDE;
OPTICAL COATINGS;
|
EID: 4243985576
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/S0257-8972(97)00585-9 Document Type: Article |
Times cited : (16)
|
References (14)
|