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Volumn 100-101, Issue 1-3, 1998, Pages 45-48

Scratch-resistant transparent boron nitride films

Author keywords

Boron nitride; Microstructure; PACVD films; Transparent films

Indexed keywords

AMORPHOUS FILMS; BORON COMPOUNDS; INFRARED SPECTROSCOPY; INTERFACES (MATERIALS); MICROSTRUCTURE; PLASMA APPLICATIONS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY; TRANSPARENCY; WEAR RESISTANCE; X RAY DIFFRACTION ANALYSIS;

EID: 4243985576     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00585-9     Document Type: Article
Times cited : (16)

References (14)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.