Silicon-compatible waveguides used for an integrated opto-mechanical pressure sensor

Optical Materials

Volumn 17, Issue 1-2, 2001, Pages 255-258

  Muller, Raluca ^a   Obreja, Paula ^a   Banu, V ^b   Pavelescu, I ^a   Dascalu, D ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b SC Baneasa SA   (Romania)

Author keywords

Mach Zehnder interferometer; Micromachining; Optical; Waveguides

Indexed keywords

AMORPHOUS SILICON; ANISOTROPY; CMOS INTEGRATED CIRCUITS; ETCHING; INTEGRATED OPTICS; INTERFEROMETERS; MICROMACHINING; OPTICAL PROPERTIES; OPTICAL SENSORS; OPTICAL SYSTEMS; PHOTODIODES; POLYIMIDES; SILICON CARBIDE; SILICON NITRIDE;

MACH-ZEHNDER INTERFEROMETERS; MICROOPTO MECHANICAL SYSTEMS (MOEMS); SILICON OXYNITRIDE;

OPTICAL WAVEGUIDES;

EID: 0035361506     PISSN: 09253467     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-3467(01)00049-0     Document Type: Conference Paper

References (6)

1. Analysis and modelling of a silicon micromachined Mach-Zehnder Interferometer for pressure sensing
2. Silicon elastomer as protective layer in 3D microfabrication of MOEMS