Analysis and modelling of a silicon micromachined Mach-Zehnder interferometer for pressure sensing

Journal of Micromechanics and Microengineering

Volumn 7, Issue 3, 1997, Pages 214-217

  Pavelescu, Ioan ^a   Müller, Raluca ^a   Moagar Poladian, Victor ^a  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER AIDED DESIGN; FINITE ELEMENT METHOD; INTEGRATED OPTOELECTRONICS; INTERFEROMETERS; MICROELECTROMECHANICAL DEVICES; OPTIMIZATION;

MACH ZEHNDER INTERFEROMETERS; SOFTWARE PACKAGE ANSYS;

PRESSURE TRANSDUCERS;

EID: 0031221177     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/7/3/035     Document Type: Article

References (3)

1. Fischer K et al 1994 Elasto-optical properties of SiON layers in an integrated optical interferometer used as a pressure sensors IEEE J. Lightwave Technol. 12 157-62
2. Timoshenko S and Woinowski-Krieger S 1981 Theory of Plates and Shells (New York: McGraw-Hill)
3. Pavelescu I and Pavelescu E 1989 Theory and design criteria for silicon piezoresistive pressure sensors (invited paper) Annual School on Semiconductors and Hybrid Technologies (Sozopol, Bulgaria (May 15-21 1989))