Atomic-size metal ion sources: Principles and use

Nanotechnology

Volumn 12, Issue 2, 2001, Pages 168-172

  Purcell, S T ^a   Vu, T B ^a   Thevenard, P ^a  

^a UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC PHYSICS; COMPUTER SIMULATION; DESORPTION; IONIZATION; NANOSTRUCTURED MATERIALS; SILICON; SUBSTRATES;

NANOMETRE-SCALE STRUCTURES;

ION SOURCES;

EID: 0035356085     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/12/2/320     Document Type: Conference Paper

References (9)