New procedure for the optical characterization of high-quality thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4099, Issue 1, 2000, Pages 124-130

  Bosch, Salvador ^a   Leinfellner, Norbert ^a   Quesnel, Etienne ^b   Duparré, Angela ^c   Ferré Borrull, Josep ^c   Guenster, Stefan ^d   Ristau, Detlev ^d  

^a UNIVERSITY OF BARCELONA   (Spain)

^b Laboratoire d Electronique de Technologie et d Instrumentation   (Spain)

^c Fraunhofer Institut für Angewandte Optik und Feinmechanik   (Spain)

^d LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Ellipsometry; Optical characterization; Spectrophotometry; Thin films

Indexed keywords

ELLIPSOMETRY; MAGNESIUM COMPOUNDS; OPTICAL CHARACTER RECOGNITION; OPTICAL COATINGS; SPECTROPHOTOMETRY; THIN FILMS;

OPTICAL CHARACTERIZATION;

OPTICAL FILMS;

EID: 0034538652     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.405812     Document Type: Article

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