4 × 4 fan-out spot generator using GaAs based VCSEL's and diffractive optical element

IEEE Photonics Technology Letters

Volumn 9, Issue 4, 1997, Pages 508-510

  Ghisoni, M ^a   Martinsson, H ^a   Eriksson, N ^a   Li, Ming ^a   Larsson, A ^a   Bengtsson, J ^a   Khan, A ^b   Parry, G ^b  

^a CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^b UNIVERSITY OF OXFORD   (United Kingdom)

Author keywords

Diffraction; Holographic optical componenets; Laser beam focussing; Laser beam steering; Optical interconnection; Semiconductor lasers; Surface emitting lasers

Indexed keywords

DIFFRACTION; HOLOGRAPHIC OPTICAL ELEMENTS; LASER BEAMS; MIRRORS; OPTICAL INTERCONNECTS; REACTIVE ION ETCHING; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM COMPOUNDS; SEMICONDUCTOR QUANTUM WELLS;

LASER BEAM FOCUSSING; LASER BEAM STEERING; REACTIVE ION BEAM ETCHING; VERTICAL CAVITY SURFACE EMITTING LASERS; WET CHEMICAL ETCHING;

SEMICONDUCTOR LASERS;

EID: 0031123364     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/68.559404     Document Type: Article

References (7)

1. J. L. Jewell, J. P. Harbison, A. Scherer, Y. H. Lee, and L. T. Florez, "Vertical cavity surface emitting lasers: Design, growth, fabrication, characterization," IEEE J. Quantum Electron., vol. 27, no. 6. pp. 1332-1346, 1991.
2. O. Blum, S. P. Kilcoyne, M. E. Warren, T. C. Du, K. L. Lear, R. P. Schneider, Jr., R. F. Carson, G. Robinson, and F. H. Peters, "Verticalcavity surface emitting lasers with integrated refractive microlenses," Electron. Lett., vol. 31, no. 1, pp. 44-45, 1995.
3. E. M. Strzelecka, G. D. Robinson, M. G. Peters, F. H. Peters, and L. A. Coldren, "Monolithic integration of vertical-cavity laser diodes with refractive microlenses," Electron. Lett., vol. 31, no. 9, pp. 724-725, 1995.
4. K. Rastani, M. Orenstein, E. Kapon, and A. C. von Lehmen, "Integration of planar Fresnel microlenses with vertical-cavity surface-emitting laser arrays," Opt. Lett., vol. 16, no. 12, pp. 919-921, 1991.
5. M. E. Warren, T. C. Du, J. R. Wendt, G. A. Vawter, R. F. Carson, K. L. Lear, S. P. Kilcoyne, R. P. Schneider, and J. C. Zolper, "Integration of diffractive lenses with addressable vertical-cavity laser arrays," in Proc. SPIE, vol. 2398, 1995, pp. 12-20.
6. J. Bengtsson, N. Eriksson, and A. Larsson, "Small feature size fan-out kinoform etched in GaAs," Appl Opt., vol. 35, no. 5, pp. 801-806, 1996.
7. J. S. Hoch, A. Grot, T. S. Tan, and J. M. Kahn, "Diffractive spot-array generation using multimode surface emitting lasers and light emitting diodes," Tech. Dig., OSA Conf. Diffractive Optics and Micro-Optics, vol. 5, 1996, pp. 71-74, paper DMD3-1.