Electron beam pre-patterning for site-control of self-assembled InAs quantum dots on InP surfaces

Journal of Electronic Materials

Volumn 30, Issue 5, 2001, Pages 482-486

  Borgstrom M ^a   Bryllert, T ^a   Gustafson, B ^a   Johansson, J ^a   Sass, T ^a   Wernersson, L E ^a   Seifert, W ^a   Samuelson, L ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

InP InAs quantum dots; MOVPE; Resonant tunneling; Self assembling

Indexed keywords

CARBON; ELECTRON BEAMS; ELECTRON TUNNELING; HETEROJUNCTIONS; METALLORGANIC VAPOR PHASE EPITAXY; NANOTECHNOLOGY; PLASMA ETCHING; RESONANT TUNNELING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; TRANSMISSION ELECTRON MICROSCOPY;

ASSISTED NANO-DEPOSITION; ELECTRON BEAM PRE-PATTERNING; INDIUM ARSENIDE QUANTUM DOTS; OXYGEN PLASMA ETCHING; SELF-ASSEMBLING; SITE CONTROL TECHNIQUE;

SEMICONDUCTOR QUANTUM DOTS;

EID: 0035331435     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-001-0087-y     Document Type: Article

References (15)