Microwave-assisted chemical vapor deposition process for synthesizing carbon nanotubes

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 3, 2001, Pages 1030-1033

  Kuo, Teng Fan ^a   Juang, Zhen Yu ^a   Tsai, Chuen Horng ^a   Tsau, You Ming ^b   Cheng, Hsiu Fung ^b   Lin, I Nan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN NORMAL UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROWAVE HEATING; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; SYNTHESIS (CHEMICAL);

REACTION CHAMBERS;

CARBON NANOTUBES;

EID: 0035326488     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1352722     Document Type: Conference Paper

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