|
Volumn 30, Issue 4, 2001, Pages 355-359
|
Material and electrical properties of electroless Ag-W thin film
|
Author keywords
Electrical resistivity; Electroless deposition; Microhardness; Reflectivity; Silver; Tungsten
|
Indexed keywords
CRYSTAL ORIENTATION;
ELECTROLESS PLATING;
ELECTRONICS PACKAGING;
MICROELECTRONICS;
MICROHARDNESS;
OPTICAL MICROSCOPY;
SEMICONDUCTING SILICON;
SILVER;
SUBSTRATES;
THERMAL EFFECTS;
THERMODYNAMIC STABILITY;
TRANSMISSION ELECTRON MICROSCOPY;
TUNGSTEN;
ULSI CIRCUITS;
X RAY PHOTOELECTRON SPECTROSCOPY;
X-RAY FLUORESCENT (XRF) SPECTROSCOPY;
THIN FILMS;
|
EID: 0035306610
PISSN: 03615235
EISSN: None
Source Type: Journal
DOI: 10.1007/s11664-001-0043-x Document Type: Article |
Times cited : (14)
|
References (12)
|