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Volumn 40, Issue 4 B, 2001, Pages 2782-2786
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Highly sensitive metal-insulator-semiconductor field-effect transistor sensors for detecting carbon monoxide gas using porous platinum and tungsten oxide thin films
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Author keywords
Carbon monoxide; Gas sensor; Metal insulator semiconductor structure; MISFET; Platinum; Tungsten oxide
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Indexed keywords
CARBON MONOXIDE;
FIELD EFFECT TRANSISTORS;
GAS ADSORPTION;
GAS DETECTORS;
METAL INSULATOR BOUNDARIES;
MIS DEVICES;
MISFET DEVICES;
PLATINUM COMPOUNDS;
THIN FILMS;
TUNGSTEN COMPOUNDS;
SPILLOVER EFFECTS;
CHEMICAL SENSORS;
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EID: 0035300816
PISSN: 00214922
EISSN: None
Source Type: Journal
DOI: 10.1143/jjap.40.2782 Document Type: Article |
Times cited : (11)
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References (22)
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