Electrical field impact on the gas adsorptivity of thin metal oxide films

Applied Physics Letters

Volumn 73, Issue 17, 1998, Pages 2524-2526

  Bogner M ^a   Fuchs, A ^a   Scharnagl, K ^a   Winter, R ^a   Doll, T ^a   Eisele, I ^a  

^a BUNDESWEHR UNIVERSITY MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1542316520     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.122503     Document Type: Article

References (9)

1. M. Madou and S. Morrison, Chemical Sensing with Solid State Devices (Academic, New York, 1989).
2. T. Wolkenstein, Electronic Processes on Semiconductor Surfaces During Chemisorption (Plenum, New York, 1991).
3. A. Fuchs, M. Bögner, T. Doll, and I. Eisele, "Design and fabrication of HSGFET gas sensors," Proceedings Microsystems Technologies 96, Potsdam (unpublished).
4. M. Bögner, A. Fuchs, T. Doll, and I. Eisele, Sens. Actuators B 47, 1 (1998).
5. A. Fuchs, M. Bögner, T. Doll, and I. Eisele, Sens. Actuators B 48, 297 (1998).
6. B. Flietner, T. Doll, J. Lechner, M. Leu, and I. Eisele, Sens. Actuators B 22, 109 (1994).
7. S. M. Sze, Semiconductor Devices (physics and technology) (Wiley, New York, 1985).
8. A. Neubecker, T. Pompl, T. Doll, W. Hansch, and I. Eisele Thin Solid Films 310, 19 (1997).
9. G. V. Samsonov, The Oxide Handbook (Plenum, New York, 1973).