SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Materials Research

Volumn 16, Issue 3, 2001, Pages 728-733

Planar oxidation of strained silicon substrates

(3) Lin, M T a Jaccodine, R J a Delph, T J a

a LEHIGH UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); COMPRESSION TESTING; OXIDATION; STRAIN; SUBSTRATES; THICKNESS MEASUREMENT;

OXIDE GROWTH; PLANAR OXIDATION;

SILICON;

EID: 0035295309 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0112 Document Type: Article

Times cited : (11)

References (15)

1
- 0032615487
- (1999) Appl. Phys. Let. , vol.74 , pp. 1981
- Mihalyi, A.¹ Jaccodine, R.J.² Delph, T.J.³

2
- 0002914184
- (1987) J. Mater. Res. , vol.2 , pp. 216
- Ravindra, N.M.¹ Narayan, H.² Fathy, D.³ Srivastava, J.K.⁴ Irene, E.A.⁵

3
- 0023312281
- (1987) J. Electrochem. Soc. , vol.134 , pp. 741
- Carim, A.H.¹ Sinclair, R.²

4
- 0028468274
- (1994) J. Electrochem. Soc. , vol.141 , pp. 1832
- Kao, S.-C.¹ Doremus, R.H.²

5
- 0003693693
- edited by H.Z. Massoud, C.R. Helms, and E.H. Poindexter (Plenum Press, NY)
- (1996) 2 Interface
- Hebert, K.J.¹ Labayen, T.² Irene, E.A.³

6
- 0020124780
- (1982) Jap. J. Appl. Phys. , vol.21
- Yasutake, K.¹ Murakami, J.² Umeno, M.³ Kawabe, H.⁴

7
- 1642621158
- (1965) J. Appl. Phys. , vol.36 , pp. 3770
- Deal, B.E.¹ Grove, A.S.²

8
- 0034500551
- Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures. edited by D.A. Buchanan, A.H. Edwards, H.J. von Bardeleben, and T. Hattori (Warrendale, PA)
- (2000) Mater. Res. Soc. Symp. Proc. , vol.592 , pp. 3-14
- Stoneham, A.M.¹ Szymanski, M.A.² Shluger, A.L.³

9
- 84887215449
- (1982) J. Electrochem. Soc. , vol.129 , pp. 1278
- Marcus, R.B.¹ Sheng, T.T.²

10
- 0023344918
- (1987) IEEE Trans. Electron Devices , vol.ED-34 , pp. 1008
- Kao, D.-B.¹ McVittie, J.P.² Nix, W.D.³ Sarasat, K.C.⁴

11
- 0033335820
- (1999) J. Mater. Res. , vol.14 , pp. 4508
- Delph, T.J.¹ Lin, M.-T.²

12
- 0024769421
- (1989) IEEE Trans. Electron Devices , vol.ED-36 , pp. 2328
- Sutardja, P.¹ Oldham, W.G.²

13
- 85037013895
- Ph.D. Thesis, Dept. of Elect. Eng., Stanford Univ.
- (1991)
- Rafferty, C.S.¹

14
- 0009187449
- (1994) J. Appl. Phys. , vol.76 , pp. 3286
- Senez, V.¹ Collard, D.² Baccus, B.³ Brault, M.⁴ Lebailly, J.⁵

15
- 0000645807
- (1998) Appl. Phys. Lett. , vol.73 , pp. 2328
- Tersoff, J.¹ Tu, Y.² Grinstein, G.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.