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Journal of Materials Research

Volumn 16, Issue 3, 2001, Pages 701-708

In situ transmission electron microscopy study of the silicidation process in Co thin films on patterned (001) Si substrates

(7) Ghica, C a Nistor, L a Bender, H b Steegen, A b Lauwers, A b Maex, K b,d Van Landuyt, Jovalan c

a NATIONAL INSTITUTE OF MATERIALS PHYSICS (Romania)

b IMEC (Belgium)

c UNIVERSITY OF ANTWERP (Belgium)

d UNIVERSITY OF LEUVEN (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EPITAXIAL GROWTH; SILICON; TRANSMISSION ELECTRON MICROSCOPY;

SILICIDATION PROCESS;

THIN FILMS;

EID: 0035295277 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0121 Document Type: Article

Times cited : (6)

References (15)

1
- 0030718048
- Thin Films-Structure and Morphology, edited by S.C. Moss, D. Ilain, R.C. Cammarata, E.H. Chason, T.L. Einstein, and E.D. Williams (Pittsburgh, PA)
- (1997) Mater. Res. Soc. Symp. Proc. , vol.441 , pp. 255-266
- Gignac, L.M.¹ Svilan, V.² Clevenger, L.A.³ Cabral, C.⁴ Lavoie, C.⁵

2
- 0029483743
- Kyoto
- (1995) 1995 Symposium of VLSI Technology Digest of Technical Papers , pp. 17
- Wang, Q.F.¹ Maex, K.² Kubicek, S.³ Jonckheere, R.⁴ Kerkwijk, B.⁵ Verbeeck, R.⁶ Biesemans, S.⁷ De Meyer, K.⁸

3
- 0001298722
- (1991) J. Appl. Phys. , vol.69 , pp. 4282
- Hsu, H.F.¹ Chen, L.J.² Chu, J.J.³

4
- 22644450688
- (1999) J. Vac. Sci. Technol. B , vol.17 , pp. 939
- Yew, J.Y.¹ Chen, L.J.² Wu, W.F.³

5
- 0003667453
- Pergamon, Oxford
- (1976) Silicon Semiconductor Data
- Wolf, H.F.¹

6
- 0024733375
- (1989) Appl. Surface Sci. , vol.38 , pp. 80
- Haderbanche, L.¹ Wetzel, P.² Pirri, C.³ Petruchetti, J.C.⁴ Bolmot, D.⁵ Gewinner, G.⁶

7
- 21144483122
- (1992) Phil. Mag. , vol.66 , pp. 933
- Catana, A.¹ Schmid, P.E.² Lu, P.³ Smith, D.J.⁴

8
- 0009112530
- Aug. 26-29, 1999, Yokohama, Japan
- (1999) Proc. Int. Conf. On "Solid State Devices and Materials" , pp. 46
- Badenes, G.¹ Rooyackers, R.² De Wolf, I.³ Deferm, L.⁴

9
- 0017995885
- (1978) J. Appl. Phys. , vol.49 , pp. 4005
- Lau, S.S.¹ Mayer, J.W.² Tu, K.N.³

10
- 0016561168
- (1975) J. Appl. Phys. , vol.46 , pp. 4301
- Van Gurp, G.J.¹ Lagnereis, C.²

11
- 0000446864
- (1992) J. Appl. Phys. , vol.71 , pp. 2211
- Bulle-Lieuwma, C.W.T.¹ Van Ommen, A.H.² Hornstra, J.³ Aussems, C.N.A.M.⁴

12
- 0031250613
- (1997) Jpn. J. Appl. Phys. , vol.36 , pp. 6244
- Sukegawa, T.¹ Tomita, H.² Fushida, A.³ Goto, K.⁴ Komiya, S.⁵ Nakamura, T.⁶

13
- 0033639750
- (2000) Microelectron Eng. , vol.50 , pp. 125
- Detavernier, C.¹ Van Meirhaeghe, R.L.² Cardon, F.³ Donaton, R.A.⁴ Maex, K.⁵

14
- 0000051704
- (2000) J. Appl. Phys. , vol.88 , pp. 133
- Detavernier, C.¹ Van Meirhaeghe, R.L.² Cardon, F.³ Maex, K.⁴ Bender, H.⁵ Zhu, S.⁶

15
- 0001092733
- (1999) Appl. Phys. Lett. , vol.75 , pp. 2924
- Alberti, A.¹ La Via, F.² Spinella, C.³ Rimini, E.⁴

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