Ferroelectric YMnO3 thin films grown by metal-organic chemical vapor deposition for metal/ferroelectric/semiconductor field-effect transistors

Thin Solid Films

Volumn 384, Issue 1, 2001, Pages 146-150

  Choi, Kyu Jeong ^a   Shin, Woong Chul ^a   Yoon, Soon Gil ^a  

^a Chungnam National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CAPACITORS; ELECTRIC INSULATING MATERIALS; ELECTRIC POTENTIAL; FERROELECTRIC MATERIALS; FIELD EFFECT TRANSISTORS; FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; THIN FILMS; YTTRIUM COMPOUNDS;

METAL/FERROELECTRIC/SEMICONDUCTOR FIELD EFFECT TRANSISTORS;

DIELECTRIC FILMS;

EID: 0035281466     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01803-4     Document Type: Article

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