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Volumn 10, Issue 3-7, 2001, Pages 650-656

High-speed diamond photoconductors: A solution for high rep-rate deep-UV laser applications

Author keywords

Defects; Diamond photodetector; Transient response; VUV laser

Indexed keywords

CHEMICAL VAPOR DEPOSITION; EXCIMER LASERS; MICROMACHINING; PHOTOCONDUCTING MATERIALS; PHOTOLITHOGRAPHY; ULTRAVIOLET RADIATION;

EID: 0035269480     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(00)00532-X     Document Type: Article
Times cited : (17)

References (21)
  • 8
    • 57649130685 scopus 로고    scopus 로고
    • Microlithographic techniques in integrated circuit fabrication
    • S.-F. Yoon, R. Yu, Mack C.A.
    • Rizvi N.H., Cashmore J., Solomon C., Rumsby P., Gower M. Microlithographic techniques in integrated circuit fabrication. Yoon S.-F., Yu R., Mack C.A. Proc. SPIE. 3183:1997;30-37.
    • (1997) Proc. SPIE , vol.3183 , pp. 30-37
    • Rizvi, N.H.1    Cashmore, J.2    Solomon, C.3    Rumsby, P.4    Gower, M.5
  • 16
    • 0003882436 scopus 로고
    • Concepts in Photoconductivity and Allied Problems
    • New York, London: Interscience Publishers, John Wiley & Sons
    • Rose A. Concepts in Photoconductivity and Allied Problems. Interscience Tracts on Physics and Astronomy, vol 19. 1963;Interscience Publishers, John Wiley & Sons, New York, London.
    • (1963) Interscience Tracts on Physics and Astronomy, Vol 19
    • Rose, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.