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Volumn 16, Issue 2, 2001, Pages 385-393
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Evaluation of the modified edge lift-off test for adhesion characterization in microelectronic multifilm applications
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Author keywords
[No Author keywords available]
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Indexed keywords
ADHESION;
BENDING (DEFORMATION);
CRACKS;
ELASTIC MODULI;
FINITE ELEMENT METHOD;
INTERFACES (MATERIALS);
MICROELECTRONICS;
SUBSTRATES;
MICROELECTRONIC MULTIFILMS;
SEMICONDUCTING FILMS;
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EID: 0035262063
PISSN: 08842914
EISSN: None
Source Type: Journal
DOI: 10.1557/JMR.2001.0058 Document Type: Article |
Times cited : (21)
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References (28)
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