Measurement of the fracture energy of SiO2/TiN interfaces using the residually-stressed thin-film micro-strip test

Materials Research Society Symposium - Proceedings

Volumn 458, Issue , 1997, Pages 465-470

  Xu, Guanghai ^a   Ragan, D D ^a   Clarke, D R ^a   He, Ming Y ^a   Ma, Qing ^a   Fujimoto, H ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CORROSION; FRACTURE; FRACTURE TESTING; FRACTURE TOUGHNESS; SILICA; STRESSES; THIN FILMS; TITANIUM NITRIDE;

DECOHESION; ELASTIC STRAIN ENERGY; MICROSTRIP TEST;

INTERFACES (MATERIALS);

EID: 0030718350     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)