Vacuum arc ion sources-a brief historical review

IEEE Transactions on Plasma Science

Volumn 25, Issue 6, 1997, Pages 1222-1228

  Brown, Lan G ^a   Oks, Efim M ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Cathodic arc; Ion beams; Ion implantation; Ion sources; Metal ions; Vacuum arc

Indexed keywords

ELECTRIC ARCS; ION BEAMS; ION IMPLANTATION;

VACUUM ARCS;

ION SOURCES;

EID: 0031353175     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/27.650897     Document Type: Article

References (66)

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