Charging identification and compensation in the scanning electron microscope

Proceedings of the International Symposium on the Physical & Failure Analysis of Integrated Circuits, IPFA

Volumn , Issue , 1997, Pages 97-102

  Wong, W K ^a   Thong, J T L ^a   Phang, J C H ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC CHARGE MEASUREMENT; ELECTROSTATIC DEVICES; MIRRORS; SCANNING ELECTRON MICROSCOPY;

FRONT END CONTROL;

INTEGRATED CIRCUIT TESTING;

EID: 0031356569     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)