Effect of pseudo-random scan parameters on negative specimen charging and beam landing errors in the scanning electron microscope

Scanning

Volumn 23, Issue 2, 2001, Pages 113-114

  Thong, J T L ^a   Wong, W K ^a   Zainal, A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006872095     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (2)

1. Lee KW, Thong JTL, Wong WK: Reduction of charging effects using pseudo-random scanning In the scanning electron microscope, Scanning 22, 112-113 (2000)
2. Postek MT: Low accelerating voltage inspection and linewidth measurement in the scanning electron microscope, scanning electron microscopy Part III. 1065-1074 (1984)