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Volumn 378-381, Issue I, 2001, Pages 320-325
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Amorphous-to-crystalline transformation of thin ITO films studied by in situ grazing incidence X-ray diffractometry
a
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Author keywords
Amorphous to crystalline transformation; In situ GIXRD; ITO
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Indexed keywords
AMORPHOUS MATERIALS;
ANNEALING;
ATOMIC FORCE MICROSCOPY;
CRYSTALLINE MATERIALS;
CRYSTALLIZATION;
MAGNETRON SPUTTERING;
PHASE TRANSITIONS;
RATE CONSTANTS;
REFLECTION;
THERMAL EFFECTS;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
GRAZING INCIDENCE X RAY DIFFRACTOMETRY;
GRAZING INCIDENCE X RAY REFLETOMETRY;
INDIUN TIN OXIDE;
INDIUM COMPOUNDS;
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EID: 0035188858
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/msf.378-381.320 Document Type: Conference Paper |
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Times cited : (2)
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References (3)
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