|
Volumn 4334, Issue , 2001, Pages 74-85
|
Micromachined gyroscopes: Challenges, design solutions, and opportunities
|
Author keywords
Gyroscope Applications; Inertial Sensors; MEMS Gyroscopes
|
Indexed keywords
MICROELECTROMECHANICAL DEVICES;
MICROMACHINING;
POWER ELECTRONICS;
SENSORS;
TRANSDUCERS;
INERTIAL SENSORS;
ON-CHIP INTEGRATION;
GYROSCOPES;
|
EID: 0035148916
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.436629 Document Type: Conference Paper |
Times cited : (36)
|
References (29)
|