Evaluation of surface characteristics of ground CVD-SiC using cast iron bond diamond wheels

Precision Engineering

Volumn 25, Issue 1, 2001, Pages 56-62

  Zhanga, Chunhe ^a   Ohmori, Hitoshi ^a   Kato, Teruko ^a   Morita, Noboru ^b  

^a INST OF PHYS AND CHEMICAL RESEARCH   (Japan)

^b CHIBA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CAST IRON; CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; DIAMOND CUTTING TOOLS; GRINDING (MACHINING); GRINDING WHEELS; RESIDUAL STRESSES; SURFACE ROUGHNESS; WHEEL DRESSING;

ROTARY DRESSING METHOD; SURFACE STRESS;

SILICON CARBIDE;

EID: 0035148692     PISSN: 01416359     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0141-6359(00)00056-8     Document Type: Article

References (14)

1. Paquin RA, Howells MR. Mirror Material for Synchrotron Radiation Optics, Proceedings of the SPIE, 1997, Vol. 3152, 2-16.
2. Suzuki H, Kodera S, Nakasuji T, Ohta T, Syoji K. Precision Grinding of Aspherical CVD-SiC Molding Die, International Journal of the JSPE, Vol. 32, No. 1, 1998, pp. 25-30.
3. th International Precision Engineering Seminar, Cranfield, UK, 1987.
4. Bifano T, Yi Y, Kahl WK. Fixed Abrasive Grinding of CVD-SiC Mirrors, Precision Engineering, Vol. 16, No. 2, 1994, pp. 109-16.
5. Suzuki H, Hirano M, Abe M, Niino Y, Namba Y. Ductile Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors, Journal of the JSPE, Vol. 61, No. 4, 1995, pp. 571-5, in Japanese.
6. Namba Y, Kobayashi H, Susuki H, Yamashita K, Taniguchi N. Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid Bonded Diamond Wheels, Annals of the CIRP, Vol. 48, No.1, 1999, pp. 277-80.
7. Ohmori H, Ohmae M, Tanino K. Ultraprecision ELID Grinding of CVD-SiC Mirrors (in Japanese), Proceedings of JSPE Autumn Meeting, Tokyo, 1994:554.
8. Ohmori H. Ultraprecision Machining System for Aspherical Mirrors(1), Proceedings of ELID-grinding, Vol. 15, RIKEN, 1996, pp. 140-6.
9. Ohmori H. Ultraprecision Machining System for Aspherical Mirrors(2), Proceedings of ELID-grinding, Vol. 15, RIKEN, 1996, pp. 146-51.
10. Ohmori H, Nakagawa T, Analysis of Mirror Surface Generation of Hard, and Brittle Materials by ELID-grinding with Super Fine Grain Metallic Bond Wheels, Annals of the CIRP, Vol. 44, No.1, 1995, pp. 287-90.
11. Zhang C, Ohmori H, Li W, Yamagata Y, Makinouchi A. Micro Truing of Thin Metal Bond Diamond Wheels, Proceeding of Spring Meeting for JSPE (in Japanese), Vol. 1, 1999, pp. 320.
12. Ohmori H, Nakagawa T, Mirror Surface Grinding of Silicon Wafers with Electrolytic In-process Dressing, Annals of the CIRP, Vol. 39, No.1, 1990, pp. 329-32.
13. Ohmori H, Nakagawa T. Utilization of Electrolyzing Non-linearity in Precision Grinding with ELID for Fabrication of Hard Material Components, Annals of the CIRP, Vol. 46, No.1, 1997, pp. 261-4.
14. Kageyama T, Mizuhara K, Morita N, Yoshida Y. Study on Residual Stress Measurement of Precision Machining Surface for Using Scanning Phase-measuring Acoustic Microscope (in Japanese), Journal of the JSPE, Vol. 64, No.11, 1998, pp. 1679-83.