Ultraprecision surface grinding of chemical vapor deposited silicon carbide for X-ray mirrors using resinoid-bonded diamond wheels

CIRP Annals - Manufacturing Technology

Volumn 48, Issue 1, 1999, Pages 277-280

  Namba, Y ^a   Kobayashi, H ^a   Suzuki, H ^b   Yamashita, K ^c   Taniguchi, N ^d  

^a CHUBU UNIVERSITY   (Japan)

^b JTEKT CORPORATION   (Japan)

^c NAGOYA UNIVERSITY   (Japan)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; GRAIN SIZE AND SHAPE; GRINDING WHEELS; MIRRORS; SCANNING ELECTRON MICROSCOPY; SILICON CARBIDE; SURFACE ROUGHNESS; X RAYS;

RESINOID BONDED DIAMOND WHEEL; ULTRAPRECISION SURFACE GRINDING;

GRINDING (MACHINING);

EID: 0032675113     PISSN: 00078506     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0007-8506(07)63183-7     Document Type: Article

References (13)

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