Long pulse ArF and F2 excimer lasers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4184, Issue , 2001, Pages 338-347

  Peters, P J M ^a   Feenstra, L ^a   Bastiaens, H M J ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

157 nm; 193 nm; Excimer laser; Gas discharge; Long pulse; X ray preionisation

Indexed keywords

FERRITES; GAS DISCHARGE TUBES; GAS LASERS; HIGH POWER LASERS; INDUCTANCE; IONIZATION; ULTRAVIOLET RADIATION;

X-RAY PREIONIZATION;

EXCIMER LASERS;

EID: 0035065554     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.414085     Document Type: Conference Paper

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