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Volumn 27, Issue 8, 1997, Pages 665-669
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Excimer ArF laser with an output energy of 0.5 J and He buffer gas
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0002120962
PISSN: 10637818
EISSN: None
Source Type: Journal
DOI: 10.1070/QE1997v027n08ABEH001026 Document Type: Article |
Times cited : (16)
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References (15)
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