Development of High Speed Nanometer Positioning Table System and Its Performances Evaluation

Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C

Volumn 64, Issue 626, 1998, Pages 4103-4108

  Hashizume, Hitoshi ^a   Shinno, Hidenori ^a  

^a NONE

Author keywords

Accuracy; Positioning; Servo Mechanism; Table System; Tracking Error; Ultraprecision

Indexed keywords

EID: 34648838034     PISSN: 03875024     EISSN: None     Source Type: Journal    
DOI: 10.1299/kikaic.64.4103     Document Type: Article

References (3)

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2. Van Den Braembussche, P., Swevers, J., Van Brussel, H. and Vanherck, P., Accurate Tracking Control of Linear Synchronous Motor Machine Tool Axes, Mechatronics, 6–5, (1996), 507–521.
3. Tomita, Y., Makino, K. and Sugimine, M., High-Response X-Y Stage System Driven by In-Parallel Linear Motors, Annals of the CIRP, 45–1, (1996), 359–362.