Two-dimensional position detection system with MEMS accelerometer for MOUSE applications

Proceedings - Design Automation Conference

Volumn , Issue , 2001, Pages 852-857

  Lee, S ^a   Nam, G J ^a   Chae, J ^a   Kim, H ^a   Drake, A J ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; MICROELECTROMECHANICAL DEVICES; MICROPROCESSOR CHIPS; READOUT SYSTEMS; REDUCED INSTRUCTION SET COMPUTING;

POSITION SENSING SYSTEMS;

MICE (COMPUTER PERIPHERALS);

EID: 0034854529     PISSN: 0738100X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

1. A batch-fabricated silicon accelerometer
2. A low-voltage bulk-silicon tunneling based microaccelerometer
3. A high sensitivity silicon-on-glass lateral μG microaccelerometer
4. An all-silicon single-wafer fabrication technology for precision micro accelerometers
5. Micromachined inertial sensors
6. Circuit techniques for reducing the effects of op-amp imperfections: Autozeroing, correlated double sampling, and chopper stabilization
7. Surface micromachined accelerometers
8. Post-CMOS processing for high-aspect-ratio integrated silicon microstructures