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Chemistry of Materials

Volumn 13, Issue 3, 2001, Pages 967-972

Room-temperature synthesis of a-SiO2 thin films by UV-assisted ozonolysis of a polymer precursor

(7) Brinkmann, M a Chan, V Z H a Thomas, E L a Lee, V Y b Miller, R D b Hadjichristidis, N c Avgeropoulos, A c

a Massachusetts Institute of Technology Cambridge (United States)

b IBM ALMADEN RESEARCH CENTER (United States)

c UNIVERSITY OF ATHENS (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

OZONE; POLY(PENTAMETHYLDISILYLSTYRENE); POLYMER; SILICON DERIVATIVE; SILICON DIOXIDE; SILICON OXYCARBIDE; UNCLASSIFIED DRUG;

ARTICLE; ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CHEMICAL COMPOSITION; ELLIPSOMETRY; FILM; INFRARED SPECTROSCOPY; LYSIS; ROENTGEN SPECTROSCOPY; SYNTHESIS; TEMPERATURE; ULTRAVIOLET RADIATION;

EID: 0034845305 PISSN: 08974756 EISSN: None Source Type: Journal
DOI: 10.1021/cm000732q Document Type: Article

Times cited : (47)

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