Kinetics of the C49-C54 transformation by micro-Raman imaging

Microelectronic Engineering

Volumn 55, Issue 1-4, 2001, Pages 109-114

  Privitera, S ^a   Quilici, S ^b   La Via, F ^c   Spinella, C ^c   Meinardi, F ^b   Rimini, E ^a  

^a UNIVERSITY OF CATANIA   (Italy)

^b UNIVERSITY OF MILANO BICOCCA   (Italy)

^c CNR IMETEM   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; DEPOSITION; FILM GROWTH; GRAIN SIZE AND SHAPE; IMAGE ANALYSIS; NUCLEATION; PHASE TRANSITIONS; RAMAN SPECTROSCOPY; REACTION KINETICS; THIN FILMS;

IMAGE ANALYSIS; MICRO-RAMAN IMAGING;

TITANIUM COMPOUNDS;

EID: 0034831819     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(00)00435-4     Document Type: Article

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