Structure of thin polycrystalline silicon films on ceramic substrates

Journal of Crystal Growth

Volumn 223, Issue 3, 2001, Pages 332-340

  Van Zutphen, A J M M ^a   Sutta P ^b   Tichelaar, F D ^c   Von Keitz, A ^d   Zeman, M ^a   Metselaar, J W ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b Military Academy of Slovakia   (Slovakia)

^c DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

^d TNO   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; CERAMIC MATERIALS; CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON; STRESS ANALYSIS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

MULLITES; POLYSILICON;

SEMICONDUCTING FILMS;

EID: 0034831506     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(01)00618-2     Document Type: Article

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