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Thin Solid Films

Volumn 382, Issue 1-2, 2001, Pages 275-279

Fabrication of TiN thin film by shadow-masked pulsed laser deposition

(3) Chen, Chu a Ong, P P a Wang, H a

a NATIONAL UNIVERSITY OF SINGAPORE (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; FILM PREPARATION; MASKS; PULSED LASER APPLICATIONS; SILICON; SUBSTRATES; THIN FILMS;

PULSED LASER DEPOSITION;

TITANIUM NITRIDE;

EID: 0034824026 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(00)01694-1 Document Type: Article

Times cited : (14)

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