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Solid State Phenomena

Volumn 80-81, Issue , 2001, Pages 169-174

Excimer laser crystallized poly-Si thin-film transistors on a plastic substrate with mobility of 250 cm2/V.s

(4) Gosain, D P a Machida, A a Usui, S a Arai, M a

a SONY CORPORATION (Japan)

Author keywords

Excimer laser; Plastic substrate; Poly silicon; Thin film transistor

Indexed keywords

CRYSTALLIZATION; DOPING (ADDITIVES); EXCIMER LASERS; IRRADIATION; LOW TEMPERATURE OPERATIONS; OPTIMIZATION; PLASTICS; SUBSTRATES; THIN FILMS;

PLASTIC SUBSTRATE; THIN FILM TRANSISTOR;

POLYSILICON;

EID: 0034818301 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (5)

References (13)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.