Electron and atomic force microscopy studies of femtosecond laser machining of Si, GaAs and InP

Conference on Lasers and Electro-Optics Europe - Technical Digest

Volumn , Issue , 2001, Pages 440-

  Borowiec, A ^a   MacKenzie, M ^a   Weatherly, G C ^a   Haugen, H K ^a  

^a MCMASTER UNIVERSITY   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; MACHINING; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTING SILICON; TRANSMISSION ELECTRON MICROSCOPY; ULTRASHORT PULSES;

LASER MACHINING;

LASER ABLATION;

EID: 0034801234     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/cleo.2001.948017     Document Type: Conference Paper

References (8)