Micromachining using a focused MeV proton beam for the production of high precision 3D microstructures with vertical sidewalls of high orthogonality

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4343, Issue , 2001, Pages 466-472

  Van Kan, J A ^a   Bettiol, A A ^a   Ansari, K ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

3D microstructures; Electroplating; High aspect ratio; Micromachining; Nuclear microscope; Proton beam

Indexed keywords

ASPECT RATIO; CURING; ELECTROPLATING; MICROSTRUCTURE; PHOTORESISTS; PROTON BEAMS; STRESSES; SYNCHROTRON RADIATION;

PROTON BEAM MICROMACHINING;

MICROMACHINING;

EID: 0034757237     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.436674     Document Type: Conference Paper

References (9)

1. Three-dimensional microfabrication using maskless irradiation with MeV ion beams: Proton-beam micromachining
2. Proton micromachining: A new technique for the production of three-dimensional microstructures
3. Sub 100 nm proton beam micromachining: Theoretical calculations on resolution limits
4. Resist materials for proton micromachining
5. The effect of external fields and slit scattering on the beam spot profile of the coupled triplet system