Development of a new type tactile sensor using micro electromagnetic coil for human robot

Proceedings of the International Symposium on Micro Machine and Human Science

Volumn , Issue , 2000, Pages 181-187

  Ding, Xianhe ^a   Kuribayashi, Katsutoshi ^a   Hashida, Takao ^a  

^a YAMAGUCHI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTHROPOMORPHIC ROBOTS; ELECTRIC COILS; ELECTROPLATING; INSTRUMENT TESTING; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; NICKEL; PHOTORESISTS; PLATE METAL; RUBBER;

HUMAN ROBOT; MICRO COIL FABRICATION; MICRO ELECTROMAGNETIC COIL; TACTILE SENSOR;

SENSORS;

EID: 0034589950     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. Y.Omori "Sensor Technology" pp1142-1149 Dec, 1998
2. H.Ueno "Intelligent Task and Motion Scheduling for Autonomous Human-Type Service Robot Arm" Artificial Intelligence, pp239-248, 1996
3. H.Ueno and Y.Saito "Knowledge-Based Approach for Autonomous Robot with Visual and Tactile Sensors" Information Modeling and Knowledge, pp256-262, 1995
4. K.Muraki and K.Kuribayashi "New Fabrication Method of Multiple-Layer Micro coil Using Anodic Oxidized Aluminum" PROC. Advanced Mechatronics pp484-488, 1998
5. M.Despont, H.Lorenz and P.Vettiger "High-Aspect-Ratio, Ultrathick, Negative-Tone Near-UV Photoresist for MEMS Applications" IEEE pp518-522, 1997
6. H.Lorenz and M.Despont "High-aspect-ratio ultrathick, negative-tone near-UV photoresist and its applications for MEMS" Sensors and Actuators, pp33-39 Mar, 1998
7. K.Murakami, K.Minami and M.Esashi "High Aspect Ratio Fabrication Method Using O2 RIE and Electroplating" Applied Surface Science 79/80,pp143-152, 1994
8. G.Engelmann, O.Ehrmann, J.Simon and H.Reichl "Fabrication of High Depth-to-Width Aspect Ratio Microstructures" MEMS'92 pp93-98, 1992
9. K.Kawabe, H.Koyama and K.Shirae "Planar Inductor" IEEE Trans. Magn., MAG-20 5,pp1804-1811, Sept. 1984
10. Y.Hamasaki and T.Ide "Fabrication of Multi-layer Eddy Current Micro Sensors for Non-destructive Inspection of Small Diameter Pipes" IEEE pp232-237, 1995
11. Y.Hamasaki and T. Ide "a Multi-layer Eddy Current Micro Sensor for Non-destructive Inspection of Small Diameter Pipes" Trnsducers'95, pp136-139, 1995
12. X.DING, K. KURIBAYASHI and T.HASHIDA "Development of a Planar Type Micro Electro Magnetic Distance Sensor using Aspect Ratio Photo resist and Its Application" Proc. of MHS'99, 227-233, (1999).