Moving vibrational measurement techniques, methodologies, and concepts from macroscopic applications to the microworld

Proceedings of the IEEE Ultrasonics Symposium

Volumn 1, Issue , 2000, Pages 513-524

  Bucaro, J A ^a   Houston, B H ^a   Photiadis, D M ^a   Romano, A J ^a   Sarkissian, A ^a   Liu, X ^a   Morse, S ^a   Vignola, J ^a   Williams, E G ^a   Marcus, M H ^a   Sekaric, L ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; LASER APPLICATIONS; OPTICAL FIBERS; OSCILLATORS (MECHANICAL); SCANNING; SILICON;

LASER DOPPLER VIBROMETRY (LDV); PADDLE OSCILLATORS;

VIBRATION MEASUREMENT;

EID: 0034579241     PISSN: 10510117     EISSN: None     Source Type: Journal    
DOI: 10.1109/ULTSYM.2000.922603     Document Type: Article

References (22)

1. Magnetic field effects on boron-doped Si oscillators
2. Micromachined silicon torsional resonator for magnetic ansisotropy measurement
3. Nanometre-scale mechanical electrometer
4. Ferromagnetic resonance force microscopy on microscopic cobalt single layer films
5. High-Q oscillator torque magnetometer
6. 2 films
7. Amorphous solid without low energy excitations
8. Single crystal silicon high-Q torsional oscillators
9. Elastic properties of thin films
10. Measurements of the mechanical Q of single crystal silicon at low temperatures
11. Excitation and attenuation of hypersonic waves in quartz
12. On the modes and loss mechanisms of a high Q mechanical oscillator
13. A technique for measurement of structure-borne intensity in plates
14. Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography
15. Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators