SCOPUS 정보 검색 플랫폼

Surface Engineering

Volumn 16, Issue 5, 2000, Pages 427-430

Nitrogen doping of amorphous DLC films by RF plasma dissociated nitrogen atom surface bombardment in a vacuum

(6) Ogwu, A A a Magill, D a Maguire, P a McLaughlin, J a McCullough, R W b Voulot, D b

a UNIVERSITY OF ULSTER (United Kingdom)

b QUEEN'S UNIVERSITY BELFAST (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; APPROXIMATION THEORY; DISSOCIATION; DOPING (ADDITIVES); PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PLASMA SOURCES; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON (DLC) FILMS; NON-BONDED NITROGEN BONDING;

PROTECTIVE COATINGS;

EID: 0034548208 PISSN: 02670844 EISSN: None Source Type: Journal
DOI: 10.1179/026708400101517422 Document Type: Article

Times cited : (9)

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