Plasma-based low-energy ion implantation for low-temperature surface engineering

Surface and Coatings Technology

Volumn 131, Issue 1-3, 2000, Pages 317-325

  Lei, M K ^a   Zhang, Z L ^a   Ma, T C ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Metal and alloy; Plasma source ion carburizing; Plasma source ion nitriding; Plasma source low energy ion enhanced deposition; Plasma based low energy ion implantation; Surface modification; Thin film

Indexed keywords

CORROSION PROTECTION; FILM; ION IMPLANTATION; PLASMA TREATMENT; WEAR RESISTANCE;

EID: 0034536207     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00799-4     Document Type: Conference Paper

References (31)