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Volumn 2, Issue , 1996, Pages 683-686
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Processing of PZT piezoelectric thin films for microelectromechanical systems
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
CARBON TETRACHLORIDE;
CHLORINE;
CHLOROFLUOROCARBONS;
DEPOSITION;
LEAD COMPOUNDS;
MICROELECTROMECHANICAL DEVICES;
PIEZOELECTRIC MATERIALS;
PLATINUM;
REACTIVE ION ETCHING;
SILICON WAFERS;
SOL-GELS;
THIN FILMS;
AUGER DEPTH PROFILING;
LEAD ZIRCONATE TITANATE;
SOL GEL DEPOSITION;
DIELECTRIC FILMS;
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EID: 0030374431
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (12)
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References (10)
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