Morphology of crystalline nitrogenated carbon films prepared by HF-CVD

Thin Solid Films

Volumn 377-378, Issue , 2000, Pages 163-169

  Kurt, R ^a   Karimi, A ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITION REACTIONS; CARBON; ELECTRON ENERGY LOSS SPECTROSCOPY; FILM PREPARATION; MICROSTRUCTURE; MOLECULAR VIBRATIONS; MORPHOLOGY; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

HOT FILAMENT CHEMICAL VAPOR DEPOSITION (HF-CVD) PROCESS;

AMORPHOUS FILMS;

EID: 0034508156     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01317-1     Document Type: Article

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