MOVPE overgrowth of metallic features for realization of 3D metal-semiconductor quantum devices

Journal of Crystal Growth

Volumn 221, Issue 1-4, 2000, Pages 704-712

  Wernersson, L E ^a   Borgstrom M ^a   Gustafson, B ^a   Gustafsson, A ^a   Jarlskog, L ^a   Malm, J O ^a   Litwin, A ^a   Samuelson, L ^a   Seifert, W ^a  

^a LUND UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICE MANUFACTURE; ELECTRON TUNNELING; OPTIMIZATION; PROCESS ENGINEERING; TRANSMISSION ELECTRON MICROSCOPY;

METAL-SEMICONDUCTOR QUANTUM DEVICES;

METALLORGANIC VAPOR PHASE EPITAXY;

EID: 0034504523     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00804-6     Document Type: Article

References (12)

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