Determination of secondary electron spectra from insulators

Scanning

Volumn 22, Issue 3, 2000, Pages 161-166

  Yong, Y C ^a   Thong, J T L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Insulators; Secondary electron spectra; Spectrometer

Indexed keywords

POLYIMIDE; SILICON NITRIDE;

ALGORITHM; ARTICLE; ELECTRON; FILM; INTEGRATED CIRCUIT; MATERIALS TESTING; MEASUREMENT; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SPECTROMETER; SPECTROMETRY;

ELECTRIC INSULATING COATINGS; ELECTRON BEAMS; PHOTORESISTS; PLASTIC FILMS; POLYIMIDES; SILICON NITRIDE; SPECTROMETRY;

SECONDARY ELECTRON SPECTROSCOPY;

SCANNING ELECTRON MICROSCOPY;

EID: 0034494397     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950220303     Document Type: Article

References (18)

1. Simple calculation of energy distribution of low-energy secondary electrons emitted from metals electron bombardment
2. Investigation of the effects of charging in SEM-based CD metrology
3. VLSI testing using the electron probe
4. A technique for accurate measurement and display of applied potential distributions using the SEM
5. Determination of the noncharging electron-beam energy on insulators
6. A technique for linearization of voltage contrast in the scanning electron microscope
7. Resolution and sensitivity of the sphericalgrid retarding potential analyzer
8. Secondary electron spectroscopy
9. Secondary electron emission due to primary and backscattered electrons
10. Monte Carlo simulation of charging effects on linewidth metrology
11. Analysis of charging effects during observation of trench structures by scanning electron microscope
12. Charging effects in low-voltage SEM metrology
13. Hemispherical retarding-field energy analyser with a microchannel plate detector and a high extraction field for voltage measurement in the scanning electron microscope
14. Secondary electron emission in the scanning electron microscope
15. The effect of passivation on the observation of voltage contrast in the scanning electron microscope
16. Insulator charging under irradiation with a stationary electron probe
17. Determination of secondary electron yield from insulators due to low-kV electron beam