SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Surface Science

Volumn 386, Issue 1-3, 1997, Pages 137-148

Self-organization of nanostructures on Si wafers using surface structure control

(1) Ogino, Toshio a

a Kashino Diverse Brain Research Laboratory of NTT Communication Science Laboratories (Japan)

Author keywords

Atomic step; Germanium; Island growth; Nanointegration; Self orientation; Silicon; Surface reaction

Indexed keywords

INTERFACES (MATERIALS); SEMICONDUCTING GERMANIUM; SEMICONDUCTOR QUANTUM DOTS; SILICON WAFERS; SURFACE STRUCTURE;

PATTERNING ASSISTED CONTROL; SELF ORGANIZATION PROCESSES; SURFACE STRUCTURE CONTROL;

NANOSTRUCTURED MATERIALS;

EID: 0031249203 PISSN: 00396028 EISSN: None Source Type: Journal
DOI: 10.1016/S0039-6028(97)00311-7 Document Type: Article

Times cited : (32)

References (41)

1
- 0000038421
- Atlanta, GA
- T. Ogino, H. Hibino, K. Prabhakaran, Abstracts of the 40th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Atlanta, GA, 1996, p. 256; J. Vac. Sci. Technol. B 14 (1996) 4134.
- (1996) Abstracts of the 40th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication , pp. 256
- Ogino, T.¹ Hibino, H.² Prabhakaran, K.³

2
- 0000038421
- T. Ogino, H. Hibino, K. Prabhakaran, Abstracts of the 40th International Conference on Electron, Ion and Photon Beam Technology and Nanofabrication, Atlanta, GA, 1996, p. 256; J. Vac. Sci. Technol. B 14 (1996) 4134.
- (1996) J. Vac. Sci. Technol. B , vol.14 , pp. 4134

3
- 25044447375
- J.M. Moison, F. Houzay, F. Barthe, L. Leprince, Appl. Phys. Lett. 64 (1994) 196.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 196
- Moison, J.M.¹ Houzay, F.² Barthe, F.³ Leprince, L.⁴

4
- 0028461636
- R. Notzel, J. Temmyo, H. Kamada, T. Furuta, T. Tamamura, Appl. Phys. Lett. 65 (1994) 457.
- (1994) Appl. Phys. Lett. , vol.65 , pp. 457
- Notzel, R.¹ Temmyo, J.² Kamada, H.³ Furuta, T.⁴ Tamamura, T.⁵

5
- 21144480018
- Ph. Avouris, I.-W. Lyo, Y. Hasegawa, J. Vac. Sci. Technol. A 11 (1993) 1725.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 1725
- Avouris, Ph.¹ Lyo, I.-W.² Hasegawa, Y.³

6
- 3643091322
- H. Kuramochi, H. Uchida, M. Aono, Phys. Rev. Lett. 72 (1994) 932.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 932
- Kuramochi, H.¹ Uchida, H.² Aono, M.³

7
- 36449004847
- T.-C. Shen, C. Wang, J.W. Lyding, J.R. Tucher, Appl. Phys. Lett. 66 (1995) 976.
- (1995) Appl. Phys. Lett. , vol.66 , pp. 976
- Shen, T.-C.¹ Wang, C.² Lyding, J.W.³ Tucher, J.R.⁴

8
- 3643059614
- Y. Takahashi, M. Nagase, H. Namatsu, K. Kurihara, K. Iwadate, Y. Nakajima, S. Horiguchi, K. Murase, M. Tabe, 1994 IEDM Tech. Dig. (1994) 938.
- (1994) 1994 IEDM Tech. Dig. , pp. 938
- Takahashi, Y.¹ Nagase, M.² Namatsu, H.³ Kurihara, K.⁴ Iwadate, K.⁵ Nakajima, Y.⁶ Horiguchi, S.⁷ Murase, K.⁸ Tabe, M.⁹

9
- 13744260744
- C.S. Lent, P.D. Tougaw, W. Porod, Appl. Phys. Lett. 62 (1993) 714.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 714
- Lent, C.S.¹ Tougaw, P.D.² Porod, W.³

10
- 0029326499
- T. Ogino, H. Hibino, Y. Homma, Jpn. J. Appl. Phys. 34 (1995) L668.
- (1995) Jpn. J. Appl. Phys. , vol.34
- Ogino, T.¹ Hibino, H.² Homma, Y.³

11
- 0030566281
- T. Ogino, H. Hibino, Y. Homma, Appl. Surf. Sci. 107 (1996) 1.
- (1996) Appl. Surf. Sci. , vol.107 , pp. 1
- Ogino, T.¹ Hibino, H.² Homma, Y.³

12
- 0030082483
- Y. Homma, N. Aizawa, T. Ogino, Jpn. J. Appl. Phys. 35 (1996) L241.
- (1996) Jpn. J. Appl. Phys. , vol.35
- Homma, Y.¹ Aizawa, N.² Ogino, T.³

13
- 21144475796
- H. Hibino, N. Shimizu, Y. Shinoda, J. Vac. Sci. Technol. A 11 (1993) 2458.
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 2458
- Hibino, H.¹ Shimizu, N.² Shinoda, Y.³

14
- 0028127540
- H. Hibino, N. Shimizu, Y. Shinoda, T. Ogino, Mater. Res. Soc. Symp. Proc. 317 (1994) 41.
- (1994) Mater. Res. Soc. Symp. Proc. , vol.317 , pp. 41
- Hibino, H.¹ Shimizu, N.² Shinoda, Y.³ Ogino, T.⁴

15
- 0001493057
- H. Hibino, T. Ogino, Appl. Phys. Lett. 67 (1995) 915.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 915
- Hibino, H.¹ Ogino, T.²

16
- 21544460483
- G.S. Higashi, R.S. Becker, Y.J. Chabal, A.J. Becker, Appl. Phys. Lett. 58 (1991) 1656.
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1656
- Higashi, G.S.¹ Becker, R.S.² Chabal, Y.J.³ Becker, A.J.⁴

17
- 0027663453
- M. Kageshima, H. Yamada, Y. Morita, H. Tokumoto, K. Nakayama, A. Kawazu, Jpn. J. Appl. Phys. 32 (1993) L1321.
- (1993) Jpn. J. Appl. Phys. , vol.32
- Kageshima, M.¹ Yamada, H.² Morita, Y.³ Tokumoto, H.⁴ Nakayama, K.⁵ Kawazu, A.⁶

18
- 36448998744
- Y. Morita, H. Tokumoto, Appl. Phys. Lett. 67 (1995) 2654.
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2654
- Morita, Y.¹ Tokumoto, H.²

19
- 0026366788
- T. Ohmi, K. Kotani, A. Teramoto, M. Miyashita, IEEE Electron Device Lett. 12 (1991) 652.
- (1991) IEEE Electron Device Lett. , vol.12 , pp. 652
- Ohmi, T.¹ Kotani, K.² Teramoto, A.³ Miyashita, M.⁴

20
- 0013134128
- K. Fujita, Y. Kasumi, M. Ichikawa, Appl. Phys. Lett. 68 (1996) 631.
- (1996) Appl. Phys. Lett. , vol.68 , pp. 631
- Fujita, K.¹ Kasumi, Y.² Ichikawa, M.³

21
- 0343851945
- S. Maruno, S. Fujita, H. Watanabe, M. Ichikawa, Appl. Phys. Lett. 69 (1996) 1382.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1382
- Maruno, S.¹ Fujita, S.² Watanabe, H.³ Ichikawa, M.⁴

22
- 0001347979
- T. Fukui, H. Saito, J. Vac. Sci. Technol. B 6 (1988) 1373.
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1373
- Fukui, T.¹ Saito, H.²

23
- 84957276864
- N.C. Bartelt, E.D. Williams, R.J. Phaneuf, Y. Yang, S. Das Sarma, J. Vac. Sci. Technol. A 7 (1989) 1898.
- (1989) J. Vac. Sci. Technol. A , vol.7 , pp. 1898
- Bartelt, N.C.¹ Williams, E.D.² Phaneuf, R.J.³ Yang, Y.⁴ Das Sarma, S.⁵

24
- 35949008890
- R.J. Phaneuf, E.D. Williams, N.C. Bartelt, Phys. Rev. B 38 (1988) 1984.
- (1988) Phys. Rev. B , vol.38 , pp. 1984
- Phaneuf, R.J.¹ Williams, E.D.² Bartelt, N.C.³

25
- 0000972042
- H. Hibino, T. Fukuda, M. Suzuki, Y. Homma, T. Sato, M. Iwatsuki, K. Miki, H. Tokumoto, Phys. Rev. B 47 (1993) 13027.
- (1993) Phys. Rev. B , vol.47 , pp. 13027
- Hibino, H.¹ Fukuda, T.² Suzuki, M.³ Homma, Y.⁴ Sato, T.⁵ Iwatsuki, M.⁶ Miki, K.⁷ Tokumoto, H.⁸

26
- 3342974842
- J. Wei, X.-S. Wang, G.L. Goldberg, N.C. Bartelt, E.D. Williams, Phys. Rev. Lett. 68 (1992) 3885.
- (1992) Phys. Rev. Lett. , vol.68 , pp. 3885
- Wei, J.¹ Wang, X.-S.² Goldberg, G.L.³ Bartelt, N.C.⁴ Williams, E.D.⁵

27
- 0000501145
- H. Hibino, T. Ogino, Phys. Rev. Lett. 72 (1994) 657.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 657
- Hibino, H.¹ Ogino, T.²

28
- 4243471416
- A.V. Latyshev, H. Minoda, Y. Tanishiro, K. Yagi, Phys. Rev. Lett. 76 (1996) 94.
- (1996) Phys. Rev. Lett. , vol.76 , pp. 94
- Latyshev, A.V.¹ Minoda, H.² Tanishiro, Y.³ Yagi, K.⁴

29
- 0026414416
- Y. Homma, M. Tomita, T. Hayashi, Surf. Sci. 258 (1991) 147.
- (1991) Surf. Sci. , vol.258 , pp. 147
- Homma, Y.¹ Tomita, M.² Hayashi, T.³

30
- 4244159584
- 177-118
- T. Ogino, H. Hibino, Y. Homma, Appl. Surf. Sci. 177-118 (1997) 642.
- (1997) Appl. Surf. Sci. , pp. 642
- Ogino, T.¹ Hibino, H.² Homma, Y.³

31
- 0029275570
- K. Sumitomo, T. Nishioka, T. Ogino, J. Vac. Sci. Technol. B 13 (1995) 387.
- (1995) J. Vac. Sci. Technol. B , vol.13 , pp. 387
- Sumitomo, K.¹ Nishioka, T.² Ogino, T.³

32
- 30244558644
- M. Copel, M.C. Reuter, E. Kaxiras, R.M. Tromp, Phys. Rev. Lett. 63 (1989) 1826.
- (1989) Phys. Rev. Lett. , vol.63 , pp. 1826
- Copel, M.¹ Reuter, M.C.² Kaxiras, E.³ Tromp, R.M.⁴

33
- 7244257542
- J. Tersoff, C. Teichert, M.G. Lagally, Phys. Rev. Lett. 76 (1996) 1675.
- (1996) Phys. Rev. Lett. , vol.76 , pp. 1675
- Tersoff, J.¹ Teichert, C.² Lagally, M.G.³

34
- 0342626631
- J.M. Gibson, H.-J. Gossmann, J.C. Bean, R.T. Tung, L.C. Feldman, Phys. Rev. Lett. 56 (1986) 355.
- (1986) Phys. Rev. Lett. , vol.56 , pp. 355
- Gibson, J.M.¹ Gossmann, H.-J.² Bean, J.C.³ Tung, R.T.⁴ Feldman, L.C.⁵

35
- 30244509801
- unpublished data.
- H. Hibino, unpublished data.
- Hibino, H.¹

36
- 36449007012
- K. Prabhakaran, T. Nishioka, K. Sumitomo, Y. Kobayashi, T. Ogino, Appl. Phys. Lett. 62 (1993) 864.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 864
- Prabhakaran, K.¹ Nishioka, T.² Sumitomo, K.³ Kobayashi, Y.⁴ Ogino, T.⁵

37
- 36449004213
- K. Prabhakaran, T. Ogino, T. Scimeca, Y. Watanabe, M. Oshima, Appl. Phys. Lett. 64 (1994) 1839.
- (1994) Appl. Phys. Lett. , vol.64 , pp. 1839
- Prabhakaran, K.¹ Ogino, T.² Scimeca, T.³ Watanabe, Y.⁴ Oshima, M.⁵

38
- 0028758896
- K. Prabhakaran, T. Nishioka, Y. Kobayashi, T. Ogino, Appl. Surf. Sci. 75 (1993) 341.
- (1993) Appl. Surf. Sci. , vol.75 , pp. 341
- Prabhakaran, K.¹ Nishioka, T.² Kobayashi, Y.³ Ogino, T.⁴

39
- 30244529721
- Boston
- T. Ogino, Y. Kobayashi, K. Sumitomo, K. Prabhakaran, Presented at MRS 1996 Fall Meeting, Boston, 1996.
- (1996) MRS 1996 Fall Meeting
- Ogino, T.¹ Kobayashi, Y.² Sumitomo, K.³ Prabhakaran, K.⁴

40
- 0009222901
- K. Prabhakaran, K. Sumitomo, T. Ogino, Appl. Phys. Lett. 63 (1996) 1241.
- (1996) Appl. Phys. Lett. , vol.63 , pp. 1241
- Prabhakaran, K.¹ Sumitomo, K.² Ogino, T.³

41
- 0031548389
- K. Prabhakaran, K. Sumitomo, T. Ogino, Appl. Surf. Sci. 117-118 (1997) 280.
- (1997) Appl. Surf. Sci. , vol.117-118 , pp. 280
- Prabhakaran, K.¹ Sumitomo, K.² Ogino, T.³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.