|
Volumn 406, Issue 1-2, 1996, Pages 131-137
|
Etching and electrochemistry of silicon in acidic bromine solutions
a a a |
Author keywords
Bromine; Crystalline silicon; Photoluminescence; Photoselective etching; Porous silicon
|
Indexed keywords
BROMINE COMPOUNDS;
CRYSTALLINE MATERIALS;
DIFFUSION IN SOLIDS;
ELECTROCHEMISTRY;
ETCHING;
PHOTOLUMINESCENCE;
POROUS SILICON;
REACTION KINETICS;
SOLUTIONS;
ACIDIC BROMINE SOLUTIONS;
ETCH RATES;
OPEN CIRCUIT PHOTOSELECTIVE ETCHING;
SILICON WAFERS;
|
EID: 0030120741
PISSN: 15726657
EISSN: None
Source Type: Journal
DOI: 10.1016/0022-0728(95)04424-8 Document Type: Article |
Times cited : (25)
|
References (17)
|